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Tung, Chih-Hang

ULSI Semiconductor Technology Atlas

€ 265.95

Ultra Large Scale Integration (ULSI) refers to chips with more than 10,000,000 devices per chip. It is the natural outgrowth of VLSI (Very Large Scale Integration). ULSI Semiconductor Technology Atlas uses TEM (Transmission Electron Microscopy) micrographs to explain and illustrate ULSI process technologies and associated problems.


Taal / Language : English

Inhoudsopgave:
Preface.
Chapter 1. Microelectronics and Microscopy.
Chapter 2. VLSI Process Introduction.
Chapter 3. Applications of TEM for Construction Analysis.
Chapter 4. TEM Sample Preparation Techniques.
Chapter 5. Ion Implantation and Substrate Defects.
Chapter 6. Dielectrics and Isolation.
Chapter 7. Silicide, Polycide, and Salicide.
Chapter 8. Metallization and Interconnects.
Chapter 9. ULSI Devices I - DRAM with Planar Capacitors.
Chapter 10. ULSI Devices II - DRAM with Stacked Capacitors.
Chapter 11. ULSI Devices III - DRAM with Trench Capacitors.
Chapter 12. ULSI Devices IV - SRAM.
Chapter 13. TEM in Failure Analysis.
Chapter 14. Novel Microelectronics Devices and Materials.
Chapter 15. TEM in Under Bump Metallization (UBM) and Advanced Electronics Packaging Technologies.
Chapter 16. High Resolution TEM in Microelectronics.
Extra informatie: 
Hardback
666 pagina's
Januari 2003
1390 gram
254 x 184 x 38 mm
Wiley-Blackwell us

Levertijd: 5 tot 11 werkdagen