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Grill, Alfred

Cold Plasma Materials Fabrication

From Fundamentals to Applications

€ 208.95

Cold plasma research and development activities, as well as its applications in materials processing have grown enormously in the past decade. Cold Plasma in Materials Fabrication is a comprehensive, up to date monograph which presents all aspects of cold, low pressure plasmas.


Taal / Language : English

Inhoudsopgave:
Preface.

List of Symbols.

Fundamentals of Plasma.

Cold Plasma Generation.

Plasma Chemistry.

Plasma Reactors.

Plasma Diagnostics.

Cold Plasma Processes for Surface Modification.

Deposition of Coatings by PECVD.

Plasma Assisted Etching.

Index.

About the Author.
Extra informatie: 
Paperback / softback
272 pagina's
Januari 1994
406 gram
230 x 156 x 17 mm
Wiley-Blackwell us

Levertijd: 5 tot 11 werkdagen