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Nederlands Buitenlands   Alles  Titel  Auteur  ISBN        
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Çayirci, Erdal ,Dr

Digital Holography for MEMS and Microsystem Metrology

€ 141.95

By taking a practical approach to the industrial inspection of digital holography, Digital Holography for MEMS and Microsystem Metrology offers a description of the use of digital holography and its growing applications for MEMS characterization, residual stress measurement, design and evaluation and device testing and inspection.


Taal / Language : English

Inhoudsopgave:
About the Editor

List of contributors

Chapter 1 Introduction
A. Asundi

Chapter 2 Digital Reflection Holography and applications
V.R. Singh and A. Asundi

2.1 Introduction to digital holography and methods

2.2 Reflection digital holographic microscopy (DHM) developments

2.3 3D imaging, static and dynamic measurements

2.4 MEMS/Microsystems characterization applications

Chapter 3 Digital Transmission Holography and applications
Qu Weijuan

3.1 Historical Introduction

3.2 Foundation of Digital Holography

3.3 Digital Holographic Microscopy System

3.4 Conclusion

Chapter 4 Digital In-line Holography and applications
Taslima Khanam

4.1. Back ground

4.2. Digital in-line holography

4.3. Methodology for 2D measurement of micro-particle

4.4. Validation and performance of the 2D measurement method

4.5. Methodology for 3D measurement of micro-fiber

4.6. Validation and performance of the 3D measurement methods

4.7. Summary & conclusions

Chapter 5 Other Applications

5.1 Digital Holography Tomography (DHT)
Yu Yingjie

5.2 High resolution Pulsed Digital Holography
Caojin Yuan and Hongchen Zhai

5.3 Digital Holographic Interferometry for Phase Distribution Measurement
Jianlin Zhao

Chapter 6 Conclusion

Extra informatie: 
Hardback
232 pagina's
Januari 2011
490 gram
244 x 166 x 19 mm
Wiley-Blackwell us
Levertijd: 5 tot 11 werkdagen